Resonac is said to have 25% global market share.
The expansion will give Resonac the capacity to make around 50,000 150mm SiC epitaxial wafers per month.
By 2025, the company will begin mass production of 200mm wafers, increasing the substrate area by 80%.
For 200mm, Resonac is considering investing in one of its plants in Saitama, Chiba and Shiga prefectures.
The company aims to raise sales of semiconductor-related products to $4.3 billion in 2025 from $2.81 billion in 2021