Resonac (formerly Showa Denko K.K.) and Soitec are to co-develop 200mm (8-inch) SmartSiC wafers using Resonac substrates and epitaxy processes, in a move towards deployment of Soitec’s SiC technology in Japan and other international markets.
Soitec’s SmartSiC wafers are produced using the company’s proprietary SmartCut technology to bond an layer of mono SiC ‘donor’ wafer to a low-resistivity polycrystalline (poly-SiC) ‘handle’ wafer.
By allowing multiple re-uses of the prime quality mono-SiC wafer, the process reduces overall energy consumption during wafer manufacturing.
Soitec has a new plant at its headquarters in Bernin, France, primarily dedicated to the production of SmartSiC wafers.